Mechanical properties of a 3C-SiC film between room temperature and 600 °C-Reference-Cited by-同舟云学术

Mechanical properties of a 3C-SiC film between room temperature and 600 °C

Published:2007-05-18 Issue:11 Volume:40 Page:3335-3342
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Pozzi Michele,Hassan Musaab,Harris Alun J,Burdess Jim S,Jiang Liudi,Lee Kin K,Cheung Rebecca,Phelps Gordon J,Wright Nick G,Zorman Christian A,Mehregany Mehran

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/40/i=11/a=012/pdf

Reference13 articles.

1. Silicon carbide for microelectromechanical systems

2. Status of silicon carbide (SiC) as a wide-bandgap semiconductor for high-temperature applications: A review

3. Improvement in the growth rate of cubic silicon carbide bulk single crystals grown by the sublimation method

4. Elastic and anelastic properties of chemical vapor deposited epitaxial 3C‐SiC

5. Evaluation of mechanical materials properties by means of surface micromachined structures

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