Plasma production with DC discharge planar magnetron device for thin film preparation
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/19/i=9/a=014/pdf
Reference16 articles.
1. High rate planar magnetron deposition of transparent, conducting, and heat reflecting films on glass and plastic
2. The use of electrostatic probes for plasma diagnostics?A review
3. Discharge threshold with electron beam injection in a weakly ionized plasma
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