A comparative study between non-equilibrium and equilibrium models of RF glow discharges
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/26/i=5/a=010/pdf
Reference47 articles.
1. A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure rf glow discharges
2. Numerical model of rf glow discharges
3. Two-dimensional simulations of rf glow discharges inN2andSF6
4. A two‐dimensional model of dc glow discharges
5. Effect of Space Charge in Cold-Cathode Gas Discharges
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