Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
21 articles.
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1. Effect of substrate bias voltage on the purity of Cu films deposited by non-mass separated ion beam deposition;Thin Solid Films;2003-06
2. References;The Foundations of Vacuum Coating Technology;2003
3. Ion beam deposition in materials research;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
4. Inelastic processes in low-energy ion-surface collisions;Surface Science Reports;1989-01
5. DIRECT ION BEAM DEPOSITION;Ion Beam Assisted Film Growth;1989