Determination of electron energy distribution function shape for non-Maxwellian plasmas using floating harmonics method-Reference-Cited by-同舟云学术

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Determination of electron energy distribution function shape for non-Maxwellian plasmas using floating harmonics method

Published:2014-12-17 Issue:2 Volume:48 Page:022001
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Huh Sung-Ryul,Kim Nam-Kyun,Roh Hyun-Joon,Choi Myung-Sun,Lee Seok-Hwan,Kim Gon-Ho

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/48/i=2/a=022001/pdf

Reference24 articles.

1. Principles of Plasma Discharges and Materials Processing

2. On simplifying approaches to the solution of the Boltzmann equation in spatially inhomogeneous plasmas

3. Solving the Boltzmann equation to obtain electron transport coefficients and rate coefficients for fluid models

4. Nonequilibrium EEDF in gas discharge plasmas

5. Dependence of Fluorocarbon Plasma Chemistry on the Electron Energy Distribution Function

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Multi-harmonic analysis in a floating harmonic probe method for diagnostics of electron energy and ion density in low-temperature plasmas;Japanese Journal of Applied Physics;2022-09-06

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