Effects of Ion Temperature on Collisionless and Collisional RF Sheath
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference30 articles.
1. Electron cyclotron resonance microwave discharges for etching and thin‐film deposition
2. Novel radio‐frequency induction plasma processing techniques
3. Large volume, high density rf inductively coupled plasma
4. Application of the physics of plasma sheaths to the modeling of rf plasma reactors
5. Analytical solution for capacitive RF sheath
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