Development of a 3D-AFM for true 3D measurements of nanostructures-Reference-Cited by-同舟云学术

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Development of a 3D-AFM for true 3D measurements of nanostructures

Published:2011-08-08 Issue:9 Volume:22 Page:094009
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Dai Gaoliang,Häßler-Grohne Wolfgang,Hüser Dorothee,Wolff Helmut,Danzebrink Hans-Ulrich,Koenders Ludger,Bosse Harald

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Link

http://stacks.iop.org/0957-0233/22/i=9/a=094009/pdf

Reference8 articles.

1. Method for imaging sidewalls by atomic force microscopy

2. Critical-Dimension Measurement using Multi-Angle-Scanning Method in Atomic Force Microscope

3. Profiles of a high-aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy

4. Development of a dual-probe Caliper CD-AFM for near model-independent nanometrology

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1. Atomic force microscopy based micro and nano sidewall imaging;Nanoscience;2024-09-04

2. Design and realization of scanning probe microscope based on a T-shaped high-aspect-ratio probe;Measurement Science and Technology;2023-10-31

3. An AFM Scanning Method with a Rotating Probe and an Adaptive Scanning Speed Strategy;2022 IEEE 61st Conference on Decision and Control (CDC);2022-12-06

4. Indirect Measurement Methods for Quality and Process Control in Nanomanufacturing;Nanomanufacturing and Metrology;2022-09

5. Toward realization of high-throughput hyperspectral imaging technique for semiconductor device metrology;Journal of Micro/Nanopatterning, Materials, and Metrology;2022-04-20

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