Electrical model parameters identification of radiofrequency discharge in argon through 1D3V/PIC-MC model
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Published:2018-07-31
Issue:9
Volume:20
Page:095401
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ISSN:1009-0630
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Container-title:Plasma Science and Technology
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language:
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Short-container-title:Plasma Sci. Technol.
Author:
MOSTAFAOUI Mohamed,
BENYOUCEF DjilaliORCID
Subject
Condensed Matter Physics
Cited by
4 articles.
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