Research on wide-range micro force generator based on interdigital capacitor array modules

Abstract

Abstract The micro Newton level standard force generator was important in the micro/nano force measurement and traceability device. How to obtain a stable and wide-range standard micro force at a lower voltage (≤220V) was a important technical problems for improving the measurement accuracy and range. The interdigital capacitor array modules were used to generator the standard micro force at a lower voltage. The research results showed that the device could achieve stable, high-accuracy, wide-range micro force output under a relatively low constant voltage. The device output range would be expanded and the output resolution would be improved without increasing the complexity of the device. The symmetrical arrangement of the micro force generator array modules and the interdigital capacitor structure greatly reduced the influence of the unbalanced load of the device and the deformation of the elastic support structure on the output micro force value. These structures were ensuring the accuracy of the micro force generator. It provided a useful basis for the design and manufacture of low-voltage and wide-range force generator in micro force measurement and value traceability devices.