A single-beam 3DoF homodyne interferometer
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
https://iopscience.iop.org/article/10.1088/1361-6501/ab7f79/pdf
Reference17 articles.
1. Linear/Angular Displacement Interferometer For Wafer Stage Metrology
2. Compact fiber-coupled three degree-of-freedom displacement interferometry for nanopositioning stage calibration
3. Compact field programmable gate array (FPGA)-based multi-axial interferometer for simultaneous tilt and distance measurement in the sub-nanometre range
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