Optimized electrode coverage of membrane actuators based on epitaxial PZT thin films-Reference-Cited by-同舟云学术

Optimized electrode coverage of membrane actuators based on epitaxial PZT thin films

Published:2013-07-11 Issue:8 Volume:22 Page:085013
ISSN:0964-1726
Container-title:Smart Materials and Structures
language:
Short-container-title:Smart Mater. Struct.

Author:

Nguyen M D,Nazeer H,Dekkers M,Blank D H A,Rijnders G

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics,Civil and Structural Engineering,Signal Processing

Link

http://stacks.iop.org/0964-1726/22/i=8/a=085013/pdf

Reference48 articles.

1. Simulation of a piezoelectrically actuated valveless micropump

2. MEMS-based micropumps in drug delivery and biomedical applications

3. Study on a piezoelectric micropump for the controlled drug delivery system

4. A review of micropumps

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