The new UME primary standard for pressure generation in the range from 9 × 10 4 Pa to 103 Pa
Author:
Publisher
IOP Publishing
Subject
General Engineering
Link
http://stacks.iop.org/0026-1394/41/i=4/a=005/pdf
Reference11 articles.
1. The calibration of vacuum gauges
2. Pressures in the high and medium vacuum range generated by a series expansion standard
3. Primary pressure measurements down to 10−6 Pa
4. Primary and secondary vacuum measurements
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