Nanofabrication toward sub-10 nm and its application to novel nanodevices-Reference-Cited by-同舟云学术

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Nanofabrication toward sub-10 nm and its application to novel nanodevices

Published:1999-01-01 Issue:2 Volume:10 Page:135-141
ISSN:0957-4484
Container-title:Nanotechnology
language:
Short-container-title:Nanotechnology

Author:

Sone J,Fujita J,Ochiai Y,Manako S,Matsui S,Nomura E,Baba T,Kawaura H,Sakamoto T,Chen C D,Nakamura Y,Tsai J S

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering

Link

http://stacks.iop.org/0957-4484/10/i=2/a=306/pdf

Reference25 articles.

1. Ultrahigh resolution of calixarene negative resist in electron beam lithography

2. Nanometer-scale resolution of calixarene negative resist in electron beam lithography

3. Positioning single atoms with a scanning tunnelling microscope

4. Manipulation of an atomic beam by a computer-generated hologram

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