Author:
Bhushan Bharat,Liu Huiwen
Abstract
Digital micromirror devices (DMDs) are commercially used for digital projection displays.
Adhesion/stiction due to contact between the spring tips and landing sites is a critical issue
that affects the reliable operation of DMDs. In this study, an atomic force microscopy
(AFM) methodology was used to perform nanoscale bending tests on the hinge of the DMD
to measure the elastic modulus which is a very important factor in its design. Micromirror
tilting measurements on the DMD chip were performed to obtain the force required to tilt
the micromirror. In addition, the adhesive force of the landing sites, and the
surface roughness, adhesive force and coefficient of friction of various films, were
measured. These data were used to understand the relationship between the interface
material properties and propensity for micromirror stiction occurrence in various
DMDs.
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering
Reference15 articles.
1. Lifetime estimates and unique failure mechanisms of the digital micromirror devices (DMD)
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