Study of reactive ion etched nanometre size trenches using a combined scanning electron microscope and scanning tunnelling microscope-Reference-Cited by-同舟云学术

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Study of reactive ion etched nanometre size trenches using a combined scanning electron microscope and scanning tunnelling microscope

Published:1992-04-01 Issue:2 Volume:3 Page:49-53
ISSN:0957-4484
Container-title:Nanotechnology
language:
Short-container-title:Nanotechnology

Author:

Rosolen G C,Wong T K S,Welland M E

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering

Reference21 articles.

1. Surface Studies by Scanning Tunneling Microscopy

2. Design of a scanning tunneling microscope for biological applications

3. Scanning tunneling microscope combined with optical microscope for large sample measurement

4. Scanning tunneling microscope combined with a scanning electron microscope

5. Combination of a scanning tunneling microscope with a scanning electron microscope

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1. Conformality in atomic layer deposition: Current status overview of analysis and modelling;Applied Physics Reviews;2019-06

2. Investigation of a nanofabrication process to achieve high aspect-ratio nanostructures on a quartz substrate;Nanotechnology;2012-12-05

3. Creating nanostructures on silicon using ion blistering and electron beam lithography;Nanotechnology;2006-01-03

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