Effect of Ar:O2 ratio on reactively magnetron sputtered ZnO film’s properties
Author:
Publisher
IOP Publishing
Subject
Metals and Alloys,Polymers and Plastics,Surfaces, Coatings and Films,Biomaterials,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/2053-1591/ab44b9/pdf
Reference49 articles.
1. Characteristics of transparent conducting Al-doped ZnO films prepared by dc magnetron sputtering
2. Characterization and analysis of ZnO:Al deposited by reactive magnetron sputtering
3. Inclined ZnO thin films produced by pulsed-laser deposition
4. Structural, optical and electrical properties of zinc oxide thin films deposited by a spray pyrolysis technique
5. Fundamentals of zinc oxide as a semiconductor
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