Abstract
Abstract
In order to obtain the relationship between the properties and the oxygen flow rate of La2Ti2O7−x film, the films were prepared by electron beam evaporation with various oxygen flow rates on Si and quartz substrates. The effects of oxygen flow on the properties of La2Ti2O7−x film were analyzed by XRD, XPS, optical constant and laser damage test. The result shows that the La2Ti2O7−x film lose oxygen and lead to the transition of Ti4+ to Ti3+ in oxygen-free environment. When the oxygen flow rate is greater than 4 sccm, the content of Ti4+ is stable. The refractive index of La2Ti2O7−x films decreases with the increase of oxygen flow rate and stabilizes at oxygen flow rate greater than 4 sccm. The extinction coefficient of film deposited in oxygen-free environment is less than 10−4. As the oxygen flow rate increases, the film absorption is further improved to reach 10−5 at wavelengths longer than 350 nm. The laser damage threshold of films increased with increasing oxygen flow and the maximum value is 18.35 J cm−2.
Funder
Xi’an Key Laboratory of Intelligent Detection and Perception
National Natural Science Foundation of China
Scientific research project of Shaanxi Provincial Department of Education
The Key Laboratory Fund of Shaanxi Provincial Science and Technology Department
Shaanxi Province Natural Science Basic Research Project
Subject
Metals and Alloys,Polymers and Plastics,Surfaces, Coatings and Films,Biomaterials,Electronic, Optical and Magnetic Materials