Degradation of Ultra-Thin Gate Oxide NMOSFETs under CVDT and SHE Stresses
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/25/11/074/pdf
Reference13 articles.
1. SILC during NBTI Stress in PMOSFETs with Ultra-Thin SiON Gate Dielectrics
2. Mechanism for stress‐induced leakage currents in thin silicon dioxide films
3. On the relationship between stress induced leakage currents and catastrophic breakdown in ultra-thin SiO2 based dielectrics
4. SILC as a measure of trap generation and predictor of T/sub BD/ in ultrathin oxides
5. Monitoring the degradation that causes the breakdown of ultrathin (<5 nm) SiO2 gate oxides
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Total Ionizing Dose Effects of 55-nm Silicon-Oxide-Nitride-Oxide-Silicon Charge Trapping Memory in Pulse and DC Modes;Chinese Physics Letters;2018-07
2. Gate leakage current of NMOSFET with ultra-thin gate oxide;Journal of Central South University;2012-11
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