Micromachined accelerometer with microprocessor controlled self‐test procedure

Author:

Beeby S.P.,Grabham N.J.,White N.M.

Abstract

This paper describes a self‐test procedure for a micromachined silicon accelerometer realized using a commercially available microprocessor. The accelerometer is fabricated using a combination of thick‐film printing and silicon micromachining. It consists of a silicon structure with thick‐film piezoelectric elements that act as sensors, detecting the deflections of the inertial mass, and also as actuators capable of performing a self‐test routine. The self‐test procedure must be performed at resonance and the microprocessor is used to identify the individual resonant frequency of each device and confirm the operation of the PZT elements. This work has successfully demonstrated the feasibility of a microprocessor implemented procedure and has highlighted some interesting behavioral characteristics of the accelerometer. The microprocessor could also be used in the future to fully test and calibrate the device thereby ensuring correct and accurate operation.

Publisher

Emerald

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Miniaturized acceleration sensors with in- plane polarized piezoelectric thin films produced by micromachining;IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control;2011-11

2. Nanogaps for Sensing;12th INTERNATIONAL CERAMICS CONGRESS PART J;2010-10-27

3. Nanogaps for Sensing;Procedia Chemistry;2009-09

4. A new binderless thick-film piezoelectric paste;Journal of Materials Science: Materials in Electronics;2007-04-27

5. Improving the piezoelectric properties of thick-film PZT: the influence of paste composition, powder milling process and electrode material;Sensors and Actuators A: Physical;2004-02

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3