1. State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
2. Zhejiang University-University of Ilinois Urbana-Champaign Institute, Interdisciplinary Center for Quantum Information, State Key Laboratory of Extreme Photonics and Instrumentation, Zhejiang University, Hangzhou 310027, China
3. Zhejiang University-Hangzhou Global Science and Technology Innovation Center, Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, Zhejiang University, Hangzhou 310027, China
4. Jinhua Institute of Zhejiang University, Zhejiang University, Jinhua 321099, China
5. Printable Electronics Research Centre, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
6. State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Haidian, Beijing 100084, China