Measurement of ion-rich sheath thickness by ion acoustic wave

Author:

Watanabe S.,Ishihara O.,Tanaca H.

Abstract

Measurements of sheath thickness in a low-pressure plasma are reported. The sheath is ion-rich and contains both ions and electrons; the sheath edge is taken as a boundary for ion acoustic waves. The thickness of the sheath is estimated from a frequency shift of the wave. Despite the actually continuous transition from plasma to sheath, a clear-cut sheath edge is observed. It should be emphasized that even a very small increase in thickness, such as 0·1mm, can be measured by this frequency-analysis method. The experimentally obtained sheath boundary is in agreement with the Tonks–Langmuir value as modified by Self.

Publisher

Cambridge University Press (CUP)

Subject

Condensed Matter Physics

Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Propagation of ion-acoustic wave in the presheath region of a plasma sheath system;Physica Scripta;2005-12-22

2. Kinetic Simulation of the Transient Sheath in Plasma Ion Implantation;Japanese Journal of Applied Physics;1992-08-15

3. Low-frequency instability excited by a mesh grid in a double-plasma device;Journal of Plasma Physics;1991-12

4. Reflection of ion-acoustic waves from bipolar potential structures;Journal of Plasma Physics;1989-04

5. Temporal evolution of collisionless sheaths;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1988-09

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