Author:
Baghchehsaraei Zargham,Shah Umer,Åberg Jan,Stemme Göran,Oberhammer Joachim
Abstract
This paper presents for the first time a novel concept of a microelectromechanical systems (MEMS) waveguide switch based on a reconfigurable surface, whose working principle is to block the wave propagation by short-circuiting the electrical field lines of the TE10 mode of a WR-12 rectangular waveguide. The reconfigurable surface is only 30 µm thick and consists of up to 1260 micromachined cantilevers and 660 contact points in the waveguide cross-section, which are moved simultaneously by integrated MEMS comb-drive actuators. Measurements of fabricated prototypes show that the devices are blocking wave propagation in the OFF-state with over 30 dB isolation for all designs, and allow for transmission of less than 0.65 dB insertion loss for the best design in the ON-state for 60–70 GHz. Furthermore, the paper investigates the integration of such microchips into WR-12 waveguides, which is facilitated by tailor-made waveguide flanges and compliant, conductive-polymer interposer sheets. It is demonstrated by reference measurements where the measured insertion loss of the switches is mainly attributed to the chip-to-waveguide assembly. For the first prototypes of this novel MEMS microwave device concept, the comb-drive actuators did not function properly due to poor fabrication yield. Therefore, for measuring the OFF-state, the devices were fixated mechanically.
Publisher
Cambridge University Press (CUP)
Subject
Electrical and Electronic Engineering
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A Mems Contactless Rotating Terahertz Waveguide Switch;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09
2. Future Scope of RF MEMS in THz Regime;Lecture Notes in Electrical Engineering;2022
3. A Packaged THz Shunt RF MEMS Switch With Low Insertion Loss;IEEE Sensors Journal;2021-11-01
4. Low-Loss Polarization-Agile U-Band Switch;IEEE Latin America Transactions;2020-09
5. A 500–750 GHz RF MEMS Waveguide Switch;IEEE Transactions on Terahertz Science and Technology;2017-05