Surface Reconstruction of Microscale Objects Based on Grid-Patterned Structured-Light Measurements

Abstract

A structured-light projection system was designed for microscale objects with surface heights that ranged from tens to hundreds of microns. The system was composed of a universal projector and microscope system that supported editing the attributes of structured-light patterns in real-time and was capable of projecting microscale patterns. On this basis, reconstructing the metal surfaces of microscale objects based on grid patterns of structured light was investigated, the internal and external parameters of microscope vision and projection systems were calibrated, and an image algorithm for grid-node detection was designed. The results indicated that the proposed method successfully reconstructed the three-dimensional (3D) surface of microscale objects, and the reconstruction results were consistent with the original surfaces. With 95% confidence, the reconstruction precision in the X- and Y-directions was approximately ±4.0 μm and in the Z-direction was approximately ±7.5 μm. The designed system and the proposed method were suitable for 3D-shape measurement of microstructures in microscopic fields and can be adapted to meet a broader range of applications, as compared to current methods.