Affiliation:
1. AIST-U Tokyo Advanced Operando-Measurement Technology Open Innovation Laboratory (OPERANDO-OIL), National Institute of Advanced Industrial Science and Technology (AIST)
Publisher
The Society of Powder Technology, Japan
Subject
Filtration and Separation,Fluid Flow and Transfer Processes,Process Chemistry and Technology,Catalysis
Reference21 articles.
1. [1] K. Tachibana, S. Ishii, K. Terashima, T. Shirafuji, Microplasma, Ohmsha (2009) 1–9.
2. [2] T. Ichiki, R. Taura, Y. Horiike, Localized and ultrahigh-rate etching of slicon wafers using atmospheric-pressure microplasma jets, J. Appl. Phys. 95 (2004) 35–39.
3. [3] Y. Sakurai, T. Kobayashi, H. Shirai, RF microplasma jet at atmospheric pressure: Application to rapid recrystallization of amorphous silicon, Jpn. J. Appl. Phys. 44 (2005) L749–L752.
4. [4] T. Ideno, Y. Ichiki, Hydrophilic patterning of polymer surface using a scanning microplasma jet source, J. Photopolymer. Sci. Technol. 17 (2004) 173–176.
5. [5] T. Ichiki, T. Koidesawa, Y. Horiike, An atmospheric-pressure microplasma jet source for the optical emission spectroscopic analysis of liquid sample, Plasma Source Sci. Technol. 12 (2003) S16–S20.