Microelectromechanical accelerator of solids
Author:
Publisher
Allerton Press
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Link
http://link.springer.com/content/pdf/10.3103/S8756699012040115.pdf
Reference11 articles.
1. M. Tilleman, “Analysis of Electrostatic Comb-Driven Actuators in Linear and Nonlinear Regions,” Intern. J. Solids and Struct. 41(18–19), 4889–4898 (2004).
2. E. G. Kostsov, Micro- and Nanoelectromechanics. State-ot-the-Art and Prospects (LAP LAMBERT Academic Publishing, Germany, 2011).
3. E. G. Kostsov, “Ferroelectric-Based Electrostatic Micromotors with Nanometer Gaps,” IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control 53(12), 2294–2299 (2006).
4. V. L. Dyatlov and E. G. Kostsov, “Electromechanical Energy Converters of Micromechanic Devices on the Basis of Ferroelectric Films,” Nucl. Instrum. and Meth. in Phys. Research A 405(2–3), 511–513 (1998).
5. V. L. Dyatlov and E. G. Kostsov, “Planar Electrostatic Micromotors on the Basis of the Ferroelectric Films,” Integrated Ferroelectrics 23(1–4), 149–160 (1999).
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