Control Charts for Particles in the Semiconductor Manufacturing Process
Author:
Publisher
Walter de Gruyter GmbH
Link
https://www.degruyter.com/document/doi/10.1515/EQC.2008.95/pdf
Reference9 articles.
1. The Impact of Clustered Defect Distributions in IC Fabrication
2. c-charts,X-charts, and the Katz Family of Distributions
3. Some Considerations in the Use of Quality Control Techniques in Integrated Circuit Fabrication
4. Clustered defects in IC fabrication: Impact on process control charts
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3. Virtual Metrology Concept for Predicting Defect Levels in Semiconductor Manufacturing;Procedia CIRP;2016
4. Sampling for Nonconformities and Other Issues in the Forthcoming Revision of ISO 2859-2;Quality and Reliability Engineering International;2012-07
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