Spectroscopic ellipsometry characterization of spin-coated Ge25S75 chalcogenide thin films

Author:

Janicek Petr12,Slang Stanislav2,Palka Karel23,Vlcek Miroslav2

Affiliation:

1. Institute of Applied Physics and Mathematics, Faculty of Chemical Technology, University of Pardubice, Studentska 95, Pardubice 53210, Czech Republic

2. Center of Materials and Nanotechnologies, Faculty of Chemical Technology, University of Pardubice, Studentska 95, Pardubice 53210, Czech Republic

3. Department of General and Inorganic Chemistry, Faculty of Chemical Technology, University of Pardubice, Studentska 95, Pardubice 53210, Czech Republic

Abstract

AbstractSpectroscopic ellipsometry study on spin-coated non-toxic Ge25S75 thin films annealed at different temperatures were conducted. Multi sample analysis with two sets of samples spin-coated onto soda-lime glass and onto silicon wafers was utilized. Optical constants (refractive index n and extinction coefficient k) of these films were determined from ellipsometric data recorded over a wide spectral range (0.05–6 eV). Different parametrization of Ge25S75 complex dielectric permittivity which consists of a Tauc-Lorentz or Cody-Lorentz oscillator describing the short wavelength absorption edge, a Lorentz or Gauss oscillators describing phonon absorption or optically active absorption of alkyl ammonium germanium salts in the middle infrared part of spectra is discussed. Using a Mott-Davis model, the decrease in local disorder with increasing annealing temperature is quantified from the short wavelength absorption edge onset. Using the Wemple-DiDomenico single oscillator model for the transparent part of the optical constants spectra, a decrease in the centroid distance of the valence and conduction bands with increasing annealing temperature is shown and increase in intensity of the inter-band optical transition due to annealing temperature occurs. Intensity of absorption near 3000 cm−1 could be used as alternative method to evaluation of quality of prepared films.

Publisher

Walter de Gruyter GmbH

Subject

General Chemical Engineering,General Chemistry

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