Heterodyne standing-wave interferometer / Heterodynes Stehende-Welle-Interferometer

Author:

Ortlepp Ingo1,Manske Eberhard1,Zöllner Jens-Peter2,Rangelow Ivo2

Affiliation:

1. Institute for Process Measurement and Sensor Technology, Technische Universität Ilmenau, 98693 Ilmenau , Germany

2. Micro- and nanoelectronic Systems Group, Technische Universität Ilmenau, 98693 Ilmenau , Germany

Abstract

Abstract This manuscript describes a novel standingwave arrangement with two laser sources of different wavelengths, emitting towards each other. The resulting standing wave has a continuously moving intensity profile, a thin, transparent photo sensor is inserted into. When the sensor is moved along the optical axis a frequency shift, proportional to the velocity, occurs. This frequency shift can be evaluated for the purpose of interferometric length measurements.

Publisher

Walter de Gruyter GmbH

Subject

Electrical and Electronic Engineering,Instrumentation

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