Preparation of SrBi 2 Ta 2 O 9 Thin Films by Liquid-Delivery MOCVD Without Additional Solvents-Reference-Cited by-同舟云学术

Preparation of SrBi 2 Ta 2 O 9 Thin Films by Liquid-Delivery MOCVD Without Additional Solvents

Published:2002-01 Issue:1 Volume:45 Page:215-222
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Nukaga Norimasa¹,Ono Hirofumi²,Shida Takuya²,Machida Hideaki³,Suzuki Toshie³,Funakubo Hiroshi¹

Affiliation:

1. a Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering , Tokyo Institute of Technology , 4259 Nagatsuta-cho, Midori-ku, Yokohama , 226-8502 , Japan

2. b LINTEC CO., LTD , 588-1 Ochikubo, Chuzu-cho, Yasu-gun, Shiga , 520-2435 , Japan

3. c TRI Chemical Laboratories INC. , 8154-217 Uenohara, Uenohara-machi, Kitatsuru-gun, Yamanashi , 409-0112 , Japan

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580215355

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2. Metal-Organic Chemical Vapor Deposition of Ferroelectric SrBi2Ta2O9 Films from a Fluorine-Containing Precursor System;Chemistry of Materials;2006-01-28

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