THERMAL STABILITY OF EPITAXIAL SrRuO3 BOTTOM ELECTRODES AND THEIR CONTRIBUTION TO THE CHARACTERISTICS OF (Ba0.5Sr0.5)TiO3 FILMS GROWN ON THEM

Author:

ITO S.1,TAKAHASHI K.1,OKAMOTO S.1,KOUTSAROFF I. P.2,CERVIN-LAWRY A.2,SAKAI J.3,ITO N.3,FUNAKUBO H.1

Affiliation:

1. a Department of Innovative and Engineered Materials , Tokyo Institute of Technology, J2-1508, 4259 Nagatsuta-Cho , Midori-Ku, 226-8502, Yokohama, Japan

2. b Technology R&D, Gennum Corporation 970 Fraser Drive, L7L 5P5 , Burlington, Ontario, Canada

3. c Japan Advanced Institute of Science and Technology 1-1 Asahidai , Nomi, 923-1292, Ishikawa, Japan

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

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