Pyroelectric Thin Film Presence Detector Arrays with Micromachined Pixels-Reference-Cited by-同舟云学术

Pyroelectric Thin Film Presence Detector Arrays with Micromachined Pixels

Published:2002-01 Issue:1 Volume:44 Page:77-90
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Koehler R.¹²,Bruchhaus R.³,Pitzer D.³,Primig R.³,Schreiter M.³,Wersing W.³,Winkler B.⁴,Gerlach G.¹,Hofmann G.²,Heß N.²

Affiliation:

1. a Institute for Solid State Electronics , Dresden University of Technology , Dresden, D-01062

2. b DIAS Angewandte Sensorik GmbH , Dresden, D-01217

3. c Siemens AG , ZT MF 2, Munich, D-81730

4. d Infineon Technologies , Munich, D-81730

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580215151

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