Electrical Properties of PZT-PCW Thick Film on Pt/Sic/Si, and Structural Stability of SiC-Reference-Cited by-同舟云学术

Electrical Properties of PZT-PCW Thick Film on Pt/Sic/Si, and Structural Stability of SiC

Published:2005-01-01 Issue:1 Volume:69 Page:93-101
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Choi Ki-Yong¹²,Choi Duck-Kyun¹²,Park Ji-Yeun³,Yoon Dae-Sung¹,Kim Tae-Song¹

Affiliation:

1. Microsystem Research Center, KIST, , 39-1 Haweolgog-dong, Seongbuk-gu, Seoul, 136-791, Korea

2. Department of Ceramic Eng., Hanyang University , 17 Hangdang-Dong, Seongdong-Gu, Seoul, 133-791, Korea

3. Department of Mater. Sci. and Eng., KAERI, , 150 Duckjin-dong, Yuseong-gu, Daejeon, 305-353, Korea

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580590897335

Reference7 articles.

1. SiC MEMS: opportunities and challenges for applications in harsh environments

2. Silicon carbide as a new MEMS technology

3. RF performance of SiC MESFET's on high resistivity substrates

4. Chemical Etching of Thermally-GrownSiO2Films on SiC Studied by Spectroscopic Ellipsometry

5. Temperature dependence of the current‐voltage characteristics of metal‐semiconductor field‐effect transistors inn‐type β‐SiC grown via chemical vapor deposition

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