Fabrication and testing of a PZT thin film high-pressure sensor-Reference-Cited by-同舟云学术

Fabrication and testing of a PZT thin film high-pressure sensor

Published:2001-01 Issue:1-4 Volume:41 Page:129-136
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Zakar Eugene¹,Polcawich Ronald²,Dubey Madan¹,Piekarski Brett¹,Mclane G.²,Conrad John¹,Piekarz Richard¹,Wickenden Dennis³,Champion John³,D'Amico William⁴,Hollis Michael S. L.⁴,Mcmullen Kenneth⁴,Porter David⁵

Affiliation:

1. a U.S. Army Research Laboratory , SEDD , Adelphi, MD 20783

2. b General Technical Services , Wall Township, NJ 07719

3. c Johns Hopkins Univ. Applied Physics Laboratory , Laurel, MD, 20723

4. d U.S. Army Research Laboratory , WMRD , Aberdeen, MD 21005

5. e EC m Inc. , Yuma Proving Ground, AZ, 85366

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580108012815

Reference6 articles.

1. D'Amico , W. P. 1998. Revolutionary technologies for miniature measurement systems - application to ground testing, AIAA 36th Aerospace Sciences Meeting. 1998, Reno. pp.98–0234. AIAA.

2. PZT thin films for microsensors and actuators: Where do we stand?

3. Fabrication of suspended piezoelectric microresonators

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