A Bidirectional Standing Wave Ultrasonic Linear Motor Based on Langevin Bending Transducer
Author:
Publisher
Informa UK Limited
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://www.tandfonline.com/doi/pdf/10.1080/00150190701369958
Reference13 articles.
1. XY stage driven by ultrasonic linear motors for the electron-beam x-ray mask writer EB-X3
2. Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage
3. Standing wave bi-directional linearly moving ultrasonic motor
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