Precision measurements on the angular and temperature dependence of sputtering-Reference-Cited by-同舟云学术

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Precision measurements on the angular and temperature dependence of sputtering

Published:1972-05 Issue:1-2 Volume:14 Page:93-100
ISSN:0033-7579
Container-title:Radiation Effects
language:en
Short-container-title:Radiation Effects

Author:

Elich J. J. Ph.¹²,Roosendaal H. E.²,Onderdelinden D.¹³

Affiliation:

1. a FOM-Instituut voor Atoomen Molecuulfysica , Kruislaan 407, Amsterdam , The Netherlands

2. b Technische Hogeschool Delft, Laboratorium voor Technische Natuurkunde , Delft , The Netherlands

3. c Rijks Instituut voor Volksgezondheid , Bilthoven , The Netherlands

Publisher

Informa UK Limited

Subject

General Engineering

Link

https://www.tandfonline.com/doi/pdf/10.1080/00337577208230477

Reference11 articles.

1. Thesis;Drentje S. A.,1968

2. Copper single crystal sputtering in the temperature range from 50K to 600K

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