The energy spectra of secondary ions emitted during ion bombardment
Author:
Publisher
Informa UK Limited
Subject
General Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/00337577708233145
Reference44 articles.
1. Joyes, P. 1973.Ion Surface Interaction, Sputtering and Related PhenomenaEdited by: Behrisch, R. 139London: Gordon and Breach.
2. Thermodynamic approach to the quantitative interpretation of sputtered ion mass spectra
3. Comparison of secondary ion yields from conducting, semiconducting and nonconducting targets bombarded with 40 keV argon ions
4. Surface ionization — “Plasma” in disguise
5. A quantum-mechanical model for the ionization and excitation of atoms during sputtering
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1. Energy distributions of Ga+ and In+ secondary ions sputtered from AIIIBV compound semiconductors by noble gas ions: Mass-dependence of the high-energy yield on the second component (P, As, Sb) of the compounds;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2003-04
2. Sputtering of high-energy metal ions in keV heavy-ion surface collisions;Surface Science;1999-03
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