Enhanced diffusion in ion implanted silicon
Author:
Publisher
Informa UK Limited
Subject
General Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/00337577008235053
Reference14 articles.
1. Non-metallic solids. Vacancy enhanced diffusion in silicon. Effects of irradiation and of chemical impurities
2. Ion Bombardment of Silicon in a Glow Discharge
3. Radiation Enhanced Diffusion in Solids
4. Influence of temperature on phosphorus ion behavior during silicon bombardment
5. RADIATION‐ENHANCED DIFFUSION OF BORON IN SILICON
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Synergistic Effects in Reduced-Activation Martensitic Steel Under Single and Sequential Helium/Hydrogen Ion Irradiation;Fusion Science and Technology;2014-10
2. GaN evaporation and enhanced diffusion of Ar during high-temperature ion implantation;Journal of Applied Physics;2003-05
3. Transient enhanced diffusion of aluminum in SiC during high temperature ion implantation;Journal of Applied Physics;1999-12
4. On the thermal annealing behavior of boron in solids;Radiation Effects and Defects in Solids;1990-10
5. Radiation defects in ion-implanted silicon. I. Mössbauer spectroscopy ofSn119defect structures from implantations of radioactive antimony;Physical Review B;1980-06-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3