1. Davidson, M., Kaufman, K., Mazor, I. and Cohen, F.Integrated Circuit Metrology, Inspection and Process Control. Proceedings of SPIE. Vol. 775, pp.233–233. Bellingham, Washington: SPIE.
2. Mirau correlation microscope
3. Profilometry with a coherence scanning microscope
4. Born, M. and Wolf, E. 1980.Principles of Optics, sixth edition, 321–321. Oxford: Pergamon.
5. Three-dimensional image realization in interference microscopy