Influence of the abnormal ratio of the dependence of cathode sputtering rate on the current in a glow discharge†
Author:
Publisher
Informa UK Limited
Subject
Electrical and Electronic Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/00207217408900427
Reference7 articles.
1. GENIS , A. A. , GORNSTEIN , I. L. , and PUGACH , A. B. , 1970 ,Pribory tlejutchego razrjada(Kiev: Technica) , p. 20 .
2. Analysis of Low-Energy Sputtering
3. Dependence of cathode sputtering rate on the current in a glow discharge†
4. Influence of the heat transfer from the cathode on the dependence of cathode sputtering rate on current and pressure in a glow discharge†
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A critical review of spectral and related physical properties of the hollow cathode discharge;Spectrochimica Acta Part B: Atomic Spectroscopy;1981-01
2. Hollow cathode metal ion lasers;IEEE Journal of Quantum Electronics;1980-08
3. Discharge studies of the Ne‐Cu laser;Journal of Applied Physics;1977-09
4. Glow discharge sputtering;Progress in Surface Science;1976-01
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