Deposition of ferroelectric PZT thin films by planar multi-target sputtering-Reference-Cited by-同舟云学术

Deposition of ferroelectric PZT thin films by planar multi-target sputtering

Published:1992-03 Issue:1 Volume:127 Page:137-142
ISSN:0015-0193
Container-title:Ferroelectrics
language:en
Short-container-title:Ferroelectrics

Author:

Bruchhaus Rainer,Huber Heinrich,Pitzer Dana,Wersing Wolfram

Publisher

Informa UK Limited

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://www.tandfonline.com/doi/pdf/10.1080/00150199208223360

Reference7 articles.

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3. Some electrical and optical properties of ferroelectric lead‐zirconate–lead‐titanate thin films

4. Characterization of Pb(Zr,Ti)O3thin films deposited from multielement metal targets

5. Roy, R. A., Etzold, K. F. and Cuomo, J. J. 1990.Ferroelectric Thin Films, Edited by: Myers, E. R. and Kingon, A. I. 77–82. Pittsburgh, PA: Mater. Res. Soc. Proc.200.

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