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Tensile strength of aluminium nitride films

  • Published:2004-11 Issue:31 Volume:84 Page:3353-3373
  • ISSN:1478-6435
  • Container-title:Philosophical Magazine
  • language:en
  • Short-container-title:Philosophical Magazine

Author:

Gang Zong Deng,Wo Ong † Chung,Aravind Manju,Po Tsang Mei,Loong Choy Chung,Lu Deren,Ma Dejun

Publisher

Informa UK Limited

Subject

Condensed Matter Physics

Reference25 articles.

1. Adam AC 1985VLSI Technologyedited by S. M. Sze SingaporeMcGraw-Hillp. 121

2. Barsoum MW 1997Fundamentals of CeramicsNew YorkMcGraw-Hillp. 401

3. Benham PP Crawford RJ 1987Mechanics of Engineering MaterialsSingaporeLongman Scientific & Technicalp. 513

4. Budinski KG Budinski MK 1999Engineering Materials: Properties and SelectionNew JerseyPrentice Hallp. 694

5. Fracture strength and biaxial modulus measurement of plasma silicon nitride films

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1. Meso-scale energy harvester: a comparison between MEMS and micromachined designs;Active and Passive Smart Structures and Integrated Systems XVII;2023-04-28

2. Lattice deformation and phase transition of aluminum nitride studied by density functional theory calculations;Journal of the Ceramic Society of Japan;2022-07-01

3. FEM simulation of AlN-based MEMS energy harvester;International Conference on Micro- and Nano-Electronics 2021;2022-01-31

4. Design and simulation of the compact MEMS energy harvester based on aluminium nitride;Journal of Physics: Conference Series;2021-12-01

5. High crystalline aluminum nitride via highly enhanced adatom diffusion driven by point defect complex;Applied Surface Science;2020-03
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