An artificial intelligence transformation model – pod redesign of photomasks in semiconductor manufacturing-Reference-Cited by-同舟云学术

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An artificial intelligence transformation model – pod redesign of photomasks in semiconductor manufacturing

Published:2023-11-08 Issue: Volume: Page:1-16
ISSN:2168-1015
Container-title:Journal of Industrial and Production Engineering
language:en
Short-container-title:Journal of Industrial and Production Engineering

Author:

Fan Shu-Kai S.¹,Chen Ming-Shen²,Hsu Chia-Yu³,Park You-Jin¹

Affiliation:

1. Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei City, Taiwan, ROC

2. Stek Co. Ltd, New Taipei City, Taoyuan, Taiwan, ROC

3. Department of Industrial Management, National Taiwan University of Science and Technology, Taipei City, Taiwan, ROC

Publisher

Informa UK Limited

Subject

Industrial and Manufacturing Engineering,Control and Systems Engineering

Link

https://www.tandfonline.com/doi/pdf/10.1080/21681015.2023.2279101

Reference41 articles.

1. An extended technology-organization-environment framework to investigate smart manufacturing system implementation in small and medium enterprises

2. A flexible smart manufacturing system in mass personalization manufacturing model based on multi-module-platform, multi-virtual-unit, and multi-production-line

3. Key Parameter Identification and Defective Wafer Detection of Semiconductor Manufacturing Processes Using Image Processing Techniques

4. Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes

5. Data-Driven Approach for Fault Detection and Diagnostic in Semiconductor Manufacturing

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1. A new ViT-Based augmentation framework for wafer map defect classification to enhance the resilience of semiconductor supply chains;International Journal of Production Economics;2024-07

2. Perfect Tracking Control of Linear Sliders Using Sliding Mode Control with Uncertainty Estimation Mechanism;Machines;2024-03-22

3. Sustainable development performance in the semiconductor industry: A data-driven practical guide to strategic roadmapping;Journal of Cleaner Production;2024-03

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