1. State Key Laboratory in Ultraprecision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong SAR, China
2. Department of Mechanical Engineering, The Hong Kong Polytechnic University, Hong Kong SAR, China
3. Hong Kong Polytechnic University Shenzhen Research Institute, Shenzhen, Guangdong, China
4. Institute of Semiconductor Manufacturing Research, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, Guangdong, China
5. School of Automotive Engineering, Wuhan University of Technology, Wuhan, China