The Kinetics of Epitaxial Silicon Deposition by the Hydrogen Reduction of Chlorosilanes†
Author:
Publisher
Informa UK Limited
Subject
Electrical and Electronic Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/00207216608937908
Reference20 articles.
1. The Distribution of Solute in Crystals Grown from the Melt. Part I. Theoretical
2. Kinetics of Silicon Crystal Growth from SiCl[sub 4] Decomposition
3. Epitaxial Growth of Silicon by Hydrogen Reduction of SiHCl[sub 3] onto Silicon Substrates
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