Dependence of cathode sputtering rate on the current in a glow discharge†
Author:
Publisher
Informa UK Limited
Subject
Electrical and Electronic Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/00207216908900006
Reference15 articles.
1. ACTON , J. K. , and SWIFT , J. D. , 1965 ,Cold Cathode Discharge Tubes(Moscow) , p. 126 .
2. On the Measurement of Current Density at the Cathode of a Glow Discharge and Aston's Law at Low Pressures and High Discharge Voltages
3. Cathode Sputtering in Glow Discharges
4. Kathodenzerst�ubung
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1. Improvement in lifetime of color DC PDP;IEEE Transactions on Electron Devices;1995-05
2. A critical review of spectral and related physical properties of the hollow cathode discharge;Spectrochimica Acta Part B: Atomic Spectroscopy;1981-01
3. Glow discharge sputtering;Progress in Surface Science;1976-01
4. Influence of the abnormal ratio of the dependence of cathode sputtering rate on the current in a glow discharge†;International Journal of Electronics;1974-04
5. Cathode Dark‐Space Measurements and Deposition Rates of Tantalum in a Sputtering System;Journal of Applied Physics;1972-06
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