Development of a high flow rate aerodynamic lens system for inclusion of nanoparticles into growing PVD films to form nanocomposite thin films

Author:

Kiesler D.1ORCID,Bastuck T.12,Kennedy M. K.2,Kruis F. E.1ORCID

Affiliation:

1. Institute of Technology for Nanostructures (NST) and Center for Nanointegration Duisburg-Essen (CENIDE), University of Duisburg-Essen, Duisburg, Germany;

2. Federal-Mogul Burscheid GmbH, Rings & Liners, Burscheid, Germany

Funder

Deutsche Forschungsgemeinschaft

Publisher

Informa UK Limited

Subject

Pollution,General Materials Science,Environmental Chemistry

Reference47 articles.

1. Abu Shgair, K. N. 2002. New possibilities for building high-vacuum chambers using glued aluminum plates and application to sputtered nanocomposite coatings. Doctoral thesis, Fachbereich Maschinenbau und Verfahrenstechnik, Technische Universität Kaiserslautern. https://kluedo.ub.uni-kl.de/frontdoor/index/index/start/0/rows/10/sortfield/score/sortorder/desc/searchtype/simple/query/Khaleel+N.+Abu+Shgair/docId/1359.

2. Progress in overexpanded supersonic jets and skimmed molecular beams in free-jet zones of silence

3. Abnormal Hall–Petch behavior in nanocrystalline MgO ceramic

4. Aerodynamic focusing of particles in a carrier gas

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