Affiliation:
1. a Department of Electrical Engineering , University of Minnesota , 200 Union St. S. E., Minneapolis, MN55455, USA
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. A batch-fabricated silicon accelerometer
2. Integrated silicon microbeam PI-FET accelerometer
3. Ristic , Ljubisa . 1994. Sensor technology and devices, 401Boston, London: Artech House.
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