Planar electrostatic micromotors on the basis of the ferroelectric films-Reference-Cited by-同舟云学术

Planar electrostatic micromotors on the basis of the ferroelectric films

Published:1999-07 Issue:1-4 Volume:23 Page:149-160
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Dyatlov V. L.¹,Kostsov E. G.²

Affiliation:

1. a Institute of Mathematics SB RAS , Novosibirsk, 630090, Russia

2. b Institute of Automatic and Electrometry SB RAS , Novosibirsk, 630090, Russia

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584589908210146

Reference17 articles.

1. Packaged Sensors, Microactuators and Three-Dimensional Microfabrication

2. Fedder , G. K. Chang , J. C. and Home , R. T. June 1992. “Termal Assembly of Polysilicon Microstructures With Narrow - Gap Electrostatic Comb Drive”. June, pp. 63–68. Island, SC: Technical Digest of the IEEE Solid-State Sensor and Actuator Workshop Hilton Head.

3. Integrated circuit compatible electrostatic polysilicon microrelays

4. Microelectromechanical systems based on ferroelectric thin films

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