Influence of sputtering power on optical, electrical properties and structure of aluminum-doped indium saving indium-tin oxide thin films sputtered on preheated substrates-Reference-Cited by-同舟云学术

Influence of sputtering power on optical, electrical properties and structure of aluminum-doped indium saving indium-tin oxide thin films sputtered on preheated substrates

Published:2022-05-10 Issue:1 Volume:751 Page:100-108
ISSN:1542-1406
Container-title:Molecular Crystals and Liquid Crystals
language:en
Short-container-title:Molecular Crystals and Liquid Crystals

Author:

Petrovska S.¹,Sergiienko R.²,Ilkiv B.¹,Nakamura T.³,Ohtsuka M.³

Affiliation:

1. National Academy of Science of Ukraine, Frantsevich Institute for Problems of Materials Science, Kyiv, Ukraine

2. National Academy of Science of Ukraine, Physico-technological Institute of Metals and Alloys, Kyiv, Ukraine

3. Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, Sendai, Japan

Funder

New Energy and Industrial Technology Development Organization

Publisher

Informa UK Limited

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

Link

https://www.tandfonline.com/doi/pdf/10.1080/15421406.2022.2073534

Reference19 articles.

1. Deposition and characterization of ITO thin film over glass for defogger application and for solar photovoltaics

2. A new method of preparing highly conductive ultra-thin indium tin oxide for plasmonic-enhanced thin film solar photovoltaic devices

3. Thin films engineering of indium tin oxide: Large area flat panel displays application

4. Optical and electrical properties of ITO thin films sputtered on flexible FEP substrate as passive thermal control system for space applications

5. Study of sol–gel-derived high tin content indium tin oxide (ITO) films on silica-coated soda lime silica glass

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