The polishing methods for large area CVD diamond wafer-Reference-Cited by-同舟云学术

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The polishing methods for large area CVD diamond wafer

Published:2023-08-16 Issue:1 Volume:3 Page:
ISSN:2694-1112
Container-title:Functional Diamond
language:en
Short-container-title:Functional Diamond

Author:

Zhang Haochen¹,Yan Zengyu¹,Song Zhipeng¹,Zhou Shuai²,Zhang Zilong³^ORCID,Chen Guo³,Liao Meiyong³^ORCID,Chen Guangchao¹

Affiliation:

1. College of Material Science and Opto-electrical Technology, University of Chinese Academy of Sciences, Beijing, China

2. Research Center of Energy and Environment, Binzhou Institute of Technology, Binzhou, China

3. Research Center for Functional Materials, National Institute for Materials Science, Tsukuba, Ibaraki, Japan

Funder

National Natural Science Foundation of China

the International Partnership Program of Chinese Academy of Sciences

Weiqiao-UCAS Special Projects on Low-Carbon Technology Development

Publisher

Informa UK Limited

Subject

General Medicine

Link

https://www.tandfonline.com/doi/pdf/10.1080/26941112.2023.2246495

Reference96 articles.

1. The 8-inch free-standing CVD diamond wafer fabricated by DC-PACVD

2. Ion bombardment induced buried lateral growth: the key mechanism for the synthesis of single crystal diamond wafers

3. High Performance of Normally‐On and Normally‐Off Devices with Highly Boron‐Doped Source and Drain on H‐Terminated Polycrystalline Diamond

4. GaN-based heterostructures with CVD diamond heat sinks: A new fabrication approach towards efficient electronic devices

5. Effect of Boron Doping on the Wear Behavior of the Growth and Nucleation Surfaces of Micro- and Nanocrystalline Diamond Films

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Simulation and Experimental Research of Plasma Generator for Dual RF-ICP-Enhanced CVD System;2024 IEEE International Conference on Plasma Science (ICOPS);2024-06-16

2. A Systematic Study of the Factors Affecting the Surface Quality of Chemically Vapor-Deposited Diamond during Chemical and Mechanical Polishing;Micromachines;2024-03-28

3. Polycrystalline CVD diamond wafer polished by molten iron erosion;Diamond and Related Materials;2024-02

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